Integrated circuits having source/drain structure and method of making

ABSTRACT

An integrated circuit includes a gate structure over a substrate. The integrated circuit includes a first silicon-containing material structure in a recess. The first silicon-containing material structure includes a first layer below a top surface of the substrate and in direct contact with the substrate. The first silicon-containing material structure includes a second layer over the first layer, wherein an entirety of the second layer is above the top surface of the substrate, a first region of the second layer closer to the gate structure is thinner than a second region of the second layer farther from the gate structure. The first silicon-containing material structure includes a third layer between the first layer and the second layer, wherein at least a portion of the third layer is below the top surface of the substrate.

PRIORITY CLAIM

The present application is a divisional of U.S. application Ser. No.16/933,470, filed Jul. 20, 2020, which is a divisional of U.S.application Ser. No. 15/726,530, filed Oct. 6, 2017, now U.S. Pat. No.10,734,517, issued Aug. 4, 2020, which is a continuation of U.S.application Ser. No. 14/312,871, filed Jun. 24, 2014, now U.S. Pat. No.9,786,780, issued Oct. 10, 2017, which is a divisional of U.S.application Ser. No. 13/029,378, filed Feb. 17, 2011, now U.S. Pat. No.8,778,767, issued Jul. 15, 2014, which claims priority of U.S.Provisional Application No. 61/414,946, filed Nov. 18, 2010, all ofwhich are incorporated herein by reference in their entireties.

RELATED APPLICATIONS

The present application is related to U.S. application Ser. No.12/886,743, filed Sep. 21, 2010, now U.S. Pat. No. 8,053,344, issuedNov. 8, 2011, which is incorporated herein by reference.

TECHNICAL FIELD

The present disclosure relates generally to the field of semiconductordevices, and more particularly, to integrated circuits and fabricationmethods thereof.

BACKGROUND

The semiconductor integrated circuit (IC) industry has experienced rapidgrowth. Technological advances in IC materials and design have producedgenerations of ICs where each generation has smaller and more complexcircuits than the previous generation. However, these advances haveincreased the complexity of processing and manufacturing ICs and, forthese advances to be realized, similar developments in IC processing andmanufacturing are needed.

In the course of IC evolution, functional density (i.e., the number ofinterconnected devices per chip area) has generally increased whilegeometry size (i.e., the smallest component (or line) that can becreated using a fabrication process) has decreased. This scaling downprocess generally provides benefits by increasing production efficiencyand lowering associated costs. Such scaling-down also produces arelatively high power dissipation value, which may be addressed by usinglow power dissipation devices such as complementarymetal-oxide-semiconductor (CMOS) devices.

BRIEF DESCRIPTION OF THE DRAWINGS

The present disclosure is best understood from the following detaileddescription when read with the accompanying figures. It is emphasizedthat, in accordance with the standard practice in the industry, variousfeatures are not drawn to scale and are used for illustration purposesonly. In fact, the numbers and dimensions of the various features may bearbitrarily increased or reduced for clarity of discussion.

FIG. 1 is a flowchart illustrating an exemplary method of forming anintegrated circuit.

FIGS. 2A-2H are schematic cross-sectional views of an integrated circuitduring various fabrication stages.

DETAILED DESCRIPTION

Generally, a plurality of ion implantations have been implemented forforming source/drain (S/D) regions, lightly-doped drain (LDD) regions,and pocket regions of transistors.

For example, an N-type source/drain (NSD) process has a room-temperaturephosphorus ion implantation that is provided to form a gradient dopantjunction profile in a substrate. A room-temperature carbon ionimplantation is then performed to the S/D regions to prevent overdiffusion of phosphorus dopants into the substrate. A room-temperaturearsenic ion implantation and a room-temperature phosphorus ionimplantation are performed to form S/D doped regions. After the multipleion implantations, a rapid thermal anneal (RTA) is performed to activatedopants and to cure damage resulting from the ion implantations. Silicdeis then formed at the top of the S/D doped regions.

As noted, the process described above uses the room-temperaturephosphorus ion implantation to form the junction profile. When the sizeof transistors is scaled down, the S/D junction profile may be too deep.The multiple ion implantations may also substantially damage the S/Dregions. To cure the damage, a high thermal budget, e.g., a higher RTAtemperature of about 1050° C. and/or a longer RTA time, may be applied.The high thermal budget may aggravate a short-channel effect (SCE) ofthe transistors. If a low thermal budget is applied, implantation damagemay not be desirably cured. The low thermal budget may also result in atransient-enhanced diffusion (TED).

In other approaches for forming S/D regions of transistors, aselective-epitaxial-growth (SEG) process has been proposed. For formingthe S/D regions, the substrate near the gate electrodes is recessed. TheSEG process epitaxially grows a single silicon layer in the recessedsubstrate. It is found that, due to a process loading effect, theepitaxially-grown silicon layers grown in the core region and theinput/output (I/O) region of the chip have different thicknesses. Thethickness variation at the center and peripheral areas may be about 3nanometer (nm) or more. In a worst-case scenario, the thicknessvariation may reach about 5 nm. If the thickness variation is large, asubsequent process, e.g., an etching process, to form contact holesexposing the S/D regions may overetch and/or underetch theepitaxially-grown silicon layers. The overetched and/or underetchedsilicon layers in the S/D regions located in different regions of thechip may affect electrical characteristics of transistors, e.g.,resistances, currents, etc.

It is understood that the following descriptions provides many differentembodiments, or examples, for implementing different features of thedisclosure. Specific examples of components and arrangements aredescribed below to simplify the present disclosure. These are, ofcourse, merely examples and are not intended to be limiting. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.Moreover, the formation of a feature on, connected to, and/or coupled toanother feature in the present disclosure that follows may includeembodiments in which the features are formed in direct contact, and mayalso include embodiments in which additional features may be formedinterposing the features, such that the features may not be in directcontact. In addition, spatially relative terms, for example, “lower,”“upper,” “horizontal,” “vertical,” “above,” “below,” “up,” “down,”“top,” “bottom,” etc. as well as derivatives thereof (e.g.,“horizontally,” “downwardly,” “upwardly,” etc.) are used for ease of thepresent disclosure of one features relationship to another feature. Thespatially relative terms are intended to cover different orientations ofthe device including the features.

Illustrated in FIG. 1 is a flowchart of an exemplary method of formingan integrated circuit. FIGS. 2A-2H are schematic cross-sectional viewsof an integrated circuit during various fabrication stages. Theintegrated circuit may include various passive and activemicroelectronic devices, such as resistors, capacitors, inductors,diodes, metal-oxide-semiconductor field effect transistors (MOSFET),complementary MOS (CMOS) transistors, bipolar junction transistors(BJT), laterally diffused MOS (LDMOS) transistors, high power MOStransistors, FinFET transistors, or other types of transistors. It isunderstood that FIGS. 2A-2H have been simplified for a betterunderstanding of the concepts of the present disclosure. Accordingly, itshould be noted that additional processes may be provided before,during, and after the method 100 of FIG. 1, and that some otherprocesses may only be briefly described herein.

Referring now to FIG. 1, the method 100 can include forming a gatestructure over a substrate (block 110). The method 100 can includeremoving portions of the substrate to form recesses adjacent to the gatestructure (block 120). The method 100 can also include forming asilicon-containing material structure in each of the recesses. Thesilicon-containing material structure has a first region and a secondregion. The second region is closer to the gate structure than the firstregion. The first region is thicker than the second region (block 130).

Referring now to FIGS. 2A-2H in conjunction with FIG. 1, an integratedcircuit 200 can be fabricated in accordance with the method 100 ofFIG. 1. In FIG. 2A, the integrated circuit 200 can have a substrate 201.In some embodiments forming N-type transistors, the substrate 201 can bea silicon substrate doped with a P-type dopant, such as boron (resultingin a P-type substrate). In other embodiments, the substrate 201 mayalternatively be made of some other suitable elementary semiconductor,such as diamond or germanium; a suitable compound semiconductor, such assilicon carbide, silicon germanium, indium arsenide, or indiumphosphide; or a suitable alloy semiconductor, such as silicon germaniumcarbide, gallium arsenic phosphide, or gallium indium phosphide.Further, the substrate 201 could include an epitaxial layer (epi layer),may be strained for performance enhancement, and may include asilicon-on-insulator (SOI) structure.

Referring again to FIG. 2A, a gate structure 203 can be formed over asurface 201 a of the substrate 201. In some embodiments forming anN-type transistor, the integrated circuit 200 can include source/drain(S/D) regions, e.g., S/D regions 207 a and 207 b, adjacent to sidewallsof the gate structure 203. In some embodiments, the gate structure 203can be a conductive gate structure, e.g., a polysilicon gate structure,a metal gate structure, a dummy gate structure, or any suitable gatestructure. For example, a conductive gate structure can have a stackstructure including a gate dielectric layer, a conductive materiallayer, and/or other suitable layers. A metal gate structure can have astack structure including a high dielectric constant gate layer, adiffusion barrier layer, a metal work function layer, a metallic layer,and/or other suitable layers. A dummy gate structure can have a stackstructure including a dummy material layer, a hard mask layer, and/orother suitable layers.

In some embodiments forming an N-type transistor, N-type lightly-dopeddrains (LDDs) 209 a and 209 b can be formed in the substrate 201.Portions of the N-type LDDs 209 a and 209 b can be formed under the gatestructure 203. The N-type LDDs 209 a and 209 b can be formed of n-typedopants (impurities). For example, the dopants can comprise phosphorous,arsenic, and/or other group V elements. In some embodiments, at leastone thermal annealing process, e.g., a rapid thermal annealing (RTA)process, can be performed to activate the dopants of the N-type LDDs 209a and 209 b. In other embodiments forming an N-type transistor, P-typepocket doped regions (not shown) can be formed in the substrate 201. TheP-type pocket doped regions can be formed of P-type dopants(impurities). For example, the dopants can comprise boron and/or othergroup III elements.

Referring to FIGS. 1 and 2B, the method 100 can include removingportions of the substrate to form recesses adjacent to the gatestructure (block 120). For example, recesses 208 a and 208 b are formedin the substrate 201 and adjacent to the gate structure 203 as shown inFIG. 2B. In some embodiments, spacers 211 a and 211 b can be formed onthe sidewalls of the gate structure 203. The recesses 208 a and 208 bcan be adjacent to the spacers 211 a and 211 b, respectively. In someembodiments, the spacers 211 a and 211 b can be made of at least onematerial, such as silicon nitride, silicon oxynitride, silicon carbide,silicon oxycarbide, other spacer materials, and/or any combinationsthereof. In other embodiments, the spacers 211 a and 211 b can bereferred to as offset spacers.

Referring to FIGS. 1 and 2C-2H, the method 100 can include forming asilicon-containing material structure in each of the recesses (block130). In some embodiments, the block 130 can include performing anepitaxial deposition/partial etch process and repeating the epitaxialdeposition/partial etch process at least once. For example, the block130 can include epitaxially depositing a silicon-containing material,e.g., a silicon-containing material 215, in each of the recesses 208a-208 b as shown in FIG. 2C.

In some embodiments forming an N-type transistor, the silicon-containingmaterial 215 can be made of at least one material, such as silicon,silicon carbide, other semiconductor materials, and/or any combinationsthereof. The deposition of the silicon-containing material 215 can useat least one silicon-containing precursor, such as silane (SiH₄),disilane (Si₂H₆), trisilane (Si₃H₈), Dichlorosilane (SiH₂Cl₂), anothersilicon-containing precursor, and/or any combinations thereof. In someembodiments, the silicon-containing precursor can have a flow rateranging from about 20 standard cubic centimeters per minute (sccm) toabout 500 sccm. In other embodiments forming a P-type transistor, thesilicon-containing material 215 can be made of at least one material,such as silicon, silicon germanium, other semiconductor materials,and/or any combinations thereof.

In some embodiments, the silicon-containing layer 215 can be formed bychemical vapor deposition (CVD), e.g., low pressure CVD (LPCVD), atomiclayer CVD (ALCVD), ultrahigh vacuum CVD (UHVCVD), reduced pressure CVD(RPCVD), any suitable CVD; molecular beam epitaxy (MBE) process; anysuitable epitaxial process; or any combinations thereof. In someembodiments, the deposition of the silicon-containing material 215 canhave a deposition temperature of about 750° C. or less. In otherembodiments, the etching temperature can range from about 500° C. toabout 750° C. The pressure of the deposition process can range fromabout 50 Torr to about 500 Torr.

In some embodiments, the deposition of the silicon-containing material215 can include in-situ doping the silicon-containing material 215. Forexample, forming an N-type transistor can use an N-type dopingprecursor, e.g., phosphine (PH3) and/or other N-type doping precursor.In some embodiments, the N-type doping precursor can have a flow rateranging from about 20 sccm to about 500 sccm. By using the in-situdoping process, the dopant profile of the silicon-containing material215 can be desirably achieved. In some embodiments, thesilicon-containing material 215 can be an N-type doped silicon layerthat is doped with phosphorus. The phosphorus-doped silicon layer can bereferred to as a silicon phosphorus (SiP) layer.

Referring to FIG. 2D, a process 220 can remove a portion of thesilicon-containing material 215 in each of the recesses 208 a-208 b. Theremaining silicon-containing material 215 a can be formed in each of therecesses 208 a-208 b. In some embodiments, the process 220 can use anetching gas including at least one of hydrogen chloride (HCl), chlorine(Cl₂), germanium hydride (GeH4), other suitable etching gases, and/orany combinations thereof. The flow rate of the etching gas can rangefrom about 30 sccm to about 300 sccm. The pressure of the process 220can range from about 50 Torr to about 500 Torr. In some embodiments, theprocess 220 can have an etching temperature of about 750° C. or less. Inother embodiments, the etching temperature can range from about 500° C.to about 750° C.

Referring to FIGS. 1 and 2E, the block 130 can include anotherdeposition process. For example, a silicon-containing material 225 canbe epitaxially deposited on the remaining silicon-containing material215 a as shown in FIG. 2E. In some embodiments, the material and/ormethod of forming the silicon-containing material 225 can be as same asor similar to those of the silicon-containing material 215 as describedabove in conjunction with FIG. 2C. In other embodiments, thesilicon-containing material 225 may have a dopant concentrationdifferent from that of the silicon-containing material 215.

Referring to FIGS. 1 and 2F, the block 130 can include another etchingprocess. For example, a process 230 can remove a portion of thesilicon-containing material 225 in each of the recesses 208 a-208 b. Theremaining silicon-containing material 225 a can be formed on theremaining silicon-containing material 215 a. In some embodiments, theprocess 230 can be as same as or similar to the process 220 describedabove in conjunction with FIG. 2D.

Referring to FIGS. 1 and 2G, in some embodiments the block 130 canfurther include forming a silicon-containing material 235 a on theremaining silicon-containing material 225 a. The process of forming ofthe silicon-containing material 235 a can be as same as or similar tothe process of forming the remaining silicon-containing material 215 aor 225 a described above in conjunction with FIGS. 2C-2D and 2E-2F,respectively.

Referring to FIGS. 1 and 2H, in some embodiments the block 130 canfurther include forming a silicon-containing material 245 a on thesilicon-containing material 235 a. The process of forming of thesilicon-containing material 245 a can be as same as or similar to theprocess of forming the remaining silicon-containing material 215 a or225 a described above in conjunction with FIGS. 2C-2D and 2E-2F,respectively.

In some embodiments, the silicon-containing material 245 a can have acentral portion 246 a and an edge portion 246 b. The edge portion 246 bis closer to the gate structure 203 and the spacer 211 b than thecentral portion 246 a. Due to the substantial material differencebetween the silicon-containing material 245 a and the spacer 221 b, theepitaxial growth of the edge portion 246 b may be clamped and slowerthan that of the central portion 246 a. In some embodiments, the edgeportion 246 b can extend from the spacer 211 b to the central portion246 a.

In some embodiments, the silicon-containing materials 215a-245 a can bereferred to as a silicon-containing material structure 213. Thesilicon-containing material structure 213 can have regions 213 a and 213b. The region 213 b can be closer to the gate structure 203 and thespacer 211 a than the region 213 a. In some embodiments, the region 213b can have an angle Θ with respect to the surface 201 a of the substrate201. The angle Θ can range from about 30° to about 80°. In otherembodiments, the regions 213 a and 213 b can have thicknesses T₁ and T₂,respectively. The thickness T₁ is larger than the thickness T₂. In someembodiments, a top surface of the region 213 a can be substantiallyplanar. In other embodiments, the top surface of the region 213 a can bearched or rounded.

It is found that, by repeating the epitaxial deposition-etching processas described above, the thickness variation of the silicon-containingmaterial structures 213 formed in a central region and a peripheryregion of a chip can be reduced. For example, the silicon-containingmaterial structures can be formed in a core region and an I/O region ofa chip. The thickness variation of the silicon-containing materialstructures 213 formed in the core region and the I/O region can be about2 nm or less. By reducing the thickness variation of thesilicon-containing material structures 213, substantial uniformelectrical characteristics, e.g., resistances, on currents, offcurrents, and/or other electrical characteristics, of transistors can beachieved.

It is noted that since the deposition temperature and etchingtemperature are about 750° C. or less, the N-type dopants or P-typedopants in the silicon-containing material 215 a-245 a are subjected tolow temperature thermal cycles. The dopants are less diffused by thethermal cycles. The dopant profile of the silicon-containing materialstructure 213 can be desirably achieved.

It is also noted that the silicon-containing material structure 213shown in FIG. 2H is merely exemplary. In some embodiments, interfacesbetween the silicon-containing materials 215 a-245 a may not exist dueto the nature of epitaxial deposition. In other embodiments, theinterface between the silicon-containing materials 235 a-245 a may besubstantially level with the surface 201 a of the substrate 201. Instill other embodiments, the interface between the silicon-containingmaterials 235 a-245 a may be higher or lower than the surface 201 a ofthe substrate 201.

As noted, the processes of the method 100 described above in conjunctionwith FIGS. 1 and 2A-2H are merely exemplary. The method 100 can includedifferent steps according to different process flows. For example, thegate structure 203 can be formed by a gate-first process or a gate-lastprocess. In some embodiments using a gate-last process, the method 100can include a gate replacing process. The gate structure 203 can be adummy gate structure. The dummy gate structure 203 can each include adummy gate material and a hard mask material formed thereover. The dummygate material can be made of at least one material such as polysilicon,amorphous silicon, silicon oxide, silicon nitride, a material having anetching rate that is substantially different from the spacers (shown inFIG. 2B).

For the gate-last process, the hard mask materials and the dummy gatematerials can be removed, for example, by a wet etch process, a dry etchprocess, or any combinations thereof. After removing the dummy gatematerials, the method 100 can include forming gate electrode materialwithin openings in which the dummy gate materials are disposed. In someembodiments, the gate electrode material can be a stack structureincluding a diffusion barrier layer, a metallic work function layer, ametallic conductive layer, and/or other suitable material layers.

In some embodiments, at least one high dielectric constant (high-k)layer (not shown) can be formed under the gate electrode material. Thehigh-k dielectric layer can include high-k dielectric materials such asHfO₂, HfSiO, HfSiON, HfTaO, HfTiO, HfZrO, other suitable high-kdielectric materials, or any combinations thereof. In some embodiments,the high-k material may further be selected from metal oxides, metalnitrides, metal silicates, transition metal-oxides, transitionmetal-nitrides, transition metal-silicates, oxynitrides of metals, metalaluminates, zirconium silicate, zirconium aluminate, silicon oxide,silicon nitride, silicon oxynitride, zirconium oxide, titanium oxide,aluminum oxide, hafnium dioxide-alumina alloy, other suitable materials,or any combinations thereof.

In some embodiments, the diffusion barrier can be configured to preventmetallic ions of the work function metal material from diffusing intothe gate dielectric material. The diffusion barrier may comprise atleast one material such as aluminum oxide, aluminum, aluminum nitride,titanium, titanium nitride, tantalum, tantalum nitride, other suitablematerial, and/or combinations thereof.

In some embodiments, the metallic work function layer can include atleast one P-metal work function layer and/or at least one N-metal workfunction layer. The P-type work function materials can includecompositions such as ruthenium, palladium, platinum, cobalt, nickel, andconductive metal oxides, and/or other suitable materials. The N-typemetal materials can include compositions such as hafnium, zirconium,titanium, tantalum, aluminum, metal carbides (e.g., hafnium carbide,zirconium carbide, titanium carbide, aluminum carbide), aluminides,and/or other suitable materials. In some embodiments, the metallicconductive layer can be made of at least one material, such as aluminum,copper, Ti, TiN, TaN, Ta, TaC, TaSiN, W, WN, MoN, MOON, RuO₂, and/orother suitable materials.

In some embodiments, dielectric materials, contact plugs, via plugs,metallic regions, and/or metallic lines (not shown) can be formed overthe gate electrode portions for interconnection. The dielectric layersmay include materials such as silicon oxide, silicon nitride, siliconoxynitride, low-k dielectric material, ultra low-k dielectric material,or any combinations thereof. The via plugs, metallic regions, and/ormetallic lines can include materials such as tungsten, aluminum, copper,titanium, tantalum, titanium nitride, tantalum nitride, nickel silicide,cobalt silicide, other proper conductive materials, and/or combinationsthereof. The via plugs, metallic regions, and/or metallic lines can beformed by any suitable processes, such as deposition, photolithography,and etching processes, and/or combinations thereof.

An aspect of this description relates to an integrated circuit. Theintegrated circuit includes a gate structure over a substrate. Theintegrated circuit further includes a first silicon-containing materialstructure in a recess adjacent to the gate structure. The firstsilicon-containing material structure includes a first layer having anuppermost surface below a top surface of the substrate and a bottommostsurface in direct contact with the substrate. The firstsilicon-containing material structure further includes a second layerover the first layer, wherein an entirety of the second layer is abovethe top surface of the substrate, a first region of the second layercloser to the gate structure is thinner than a second region of thesecond layer farther from the gate structure, thickness is measured in adirection perpendicular to the top surface of the substrate, and awidth, measured perpendicular to the thickness of the second layer isequal to a width of the first layer. The first silicon-containingmaterial structure further includes a third layer between the firstlayer and the second layer, wherein at least a portion of the thirdlayer is below the top surface of the substrate. In some embodiments,the third layer is doped. In some embodiments, the third layer has adifferent dopant concentration from the first layer. In someembodiments, a crystal structure of the first layer is a same crystalstructure as the third layer. In some embodiments, an angle between atop surface of the second layer adjacent to the gate structure and thetop surface of the substrate ranges from about 30-degrees to about80-degrees. In some embodiments, the integrated circuit includes asecond silicon-containing material structure in the substrate and spacedfrom the gate structure. In some embodiments, a difference between atotal thickness of the first silicon-containing material structure and atotal thickness of the second silicon-containing material structure isabout 2 nanometers (nm) or less.

An aspect of this description relates to a method of making asemiconductor device. The method includes forming a gate structure overa substrate. The method includes etching the substrate to define arecess in the substrate. The method includes depositing a firstsilicon-containing material structure in the recess. Depositing thefirst silicon-containing material structure includes depositing a firstlayer having an uppermost surface below a top surface of the substrateand a bottommost surface in direct contact with the substrate.Depositing the first silicon-containing material structure furtherincludes depositing a second layer over the first layer, wherein atleast a portion of the second layer is below the top surface of thesubstrate. Depositing the first silicon-containing material structurefurther includes depositing a third layer over the second layer, whereinan entirety of the third layer is above the top surface of thesubstrate, a first region of the third layer is thinner than a secondregion of the third layer, thickness is measured in a directionperpendicular to the top surface of the substrate, and a width, measuredperpendicular to the thickness, of the third layer is equal to a widthof the first layer. In some embodiments, the method further includesdoping the second layer. In some embodiments, the method furtherincludes doping the first layer, wherein a dopant concentration of thesecond layer is different from a dopant concentration of the firstlayer. In some embodiments, depositing the second layer includesdefining a crystal structure of the second layer equal to a crystalstructure as the first layer. In some embodiments, depositing the thirdlayer includes defining an angle between a top surface of the firstregion of the third layer and the top surface of the substrate rangesfrom about 30-degrees to about 80-degrees.

An aspect of this description relates to an integrated circuit. Theintegrated circuit includes a gate structure over a substrate. Theintegrated circuit further includes a first silicon-containing materialstructure in a recess adjacent to the gate structure. The firstsilicon-containing material structure includes a first layer having anuppermost surface below a top surface of the substrate and a bottommostsurface in direct contact with the substrate. The firstsilicon-containing material further includes a second layer over thefirst layer, wherein an entirety of the second layer is above the topsurface of the substrate, a first region of the second layer closer tothe gate structure has a variable thickness, a second region of thesecond layer farther from the gate structure has a uniform thickness,and thickness is measured in a direction perpendicular to the topsurface of the substrate. The first silicon-containing material furtherincludes a third layer between the first layer and the second layer,wherein an entirety of the third layer is below the top surface of thesubstrate. In some embodiments, a top surface of the second layer isangled relative to a bottom surface of the second layer by an angleranging from about 30-degrees to about 80-degrees. In some embodiments,the integrated circuit further includes a second silicon-containingmaterial in a second region adjacent to the gate structure. In someembodiments, the second silicon-containing material is on an oppositeside of the gate structure from the first silicon-containing material.In some embodiments, an entirety of the first silicon-containingstructure is beyond a boundary of the gate structure in a directionparallel to the top surface of the substrate. In some embodiments, thethird layer has a dopant concentration different from a dopantconcentration of the first layer. In some embodiments, a material of thesecond layer is a same material as a material of the first layer. Insome embodiments, the integrated circuit further includes a lightlydoped drain (LDD) extends from the first silicon-containing material ina direction parallel to the top surface of the substrate, wherein theLDD directly contacts the third layer.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. An integrated circuit comprising: a gatestructure over a substrate; and a first silicon-containing materialstructure in a recess adjacent to the gate structure, wherein the firstsilicon-containing material structure comprises: a first layer having anuppermost surface below a top surface of the substrate and a bottommostsurface in direct contact with the substrate; a second layer over thefirst layer, wherein an entirety of the second layer is above the topsurface of the substrate, a first region of the second layer closer tothe gate structure is thinner than a second region of the second layerfarther from the gate structure, thickness is measured in a directionperpendicular to the top surface of the substrate, and a width, measuredperpendicular to the thickness, of the second layer is equal to a widthof the first layer; and a third layer between the first layer and thesecond layer, wherein at least a portion of the third layer is below thetop surface of the substrate.
 2. The integrated circuit of claim 1,wherein the third layer is doped.
 3. The integrated circuit of claim 2,wherein the third layer has a different dopant concentration from thefirst layer.
 4. The integrated circuit of claim 2, wherein a crystalstructure of the first layer is a same crystal structure as the thirdlayer.
 5. The integrated circuit of claim 1, wherein an angle between atop surface of the second layer adjacent to the gate structure and thetop surface of the substrate ranges from about 30-degrees to about80-degrees.
 6. The integrated circuit of claim 1, further comprising asecond silicon-containing material structure in the substrate and spacedfrom the gate structure.
 7. The integrated circuit of claim 6, wherein adifference between a total thickness of the first silicon-containingmaterial structure and a total thickness of the secondsilicon-containing material structure is about 2 nanometers (nm) orless.
 8. A method of making a semiconductor device, the methodcomprising: forming a gate structure over a substrate; etching thesubstrate to define a recess in the substrate; depositing a firstsilicon-containing material structure in the recess, wherein depositingthe first silicon-containing material structure comprises: depositing afirst layer having an uppermost surface below a top surface of thesubstrate and a bottommost surface in direct contact with the substrate;depositing a second layer over the first layer, wherein at least aportion of the second layer is below the top surface of the substrate;depositing a third layer over the second layer, wherein an entirety ofthe third layer is above the top surface of the substrate, a firstregion of the third layer is thinner than a second region of the thirdlayer, thickness is measured in a direction perpendicular to the topsurface of the substrate, and a width, measured perpendicular to thethickness, of the third layer is equal to a width of the first layer. 9.The claim of claim 8, further comprising doping the second layer. 10.The method of claim 9, further comprising doping the first layer,wherein a dopant concentration of the second layer is different from adopant concentration of the first layer.
 11. The method of claim 9,wherein depositing the second layer comprises defining a crystalstructure of the second layer equal to a crystal structure as the firstlayer.
 12. The method of claim 8, depositing the third layer comprisesdefining an angle between a top surface of the first region of the thirdlayer and the top surface of the substrate ranges from about 30-degreesto about 80-degrees.
 13. An integrated circuit comprising: a gatestructure over a substrate; and a first silicon-containing materialstructure in a recess adjacent to the gate structure, wherein the firstsilicon-containing material structure comprises: a first layer having anuppermost surface below a top surface of the substrate and a bottommostsurface in direct contact with the substrate; a second layer over thefirst layer, wherein an entirety of the second layer is above the topsurface of the substrate, a first region of the second layer closer tothe gate structure has a variable thickness, a second region of thesecond layer farther from the gate structure has a uniform thickness,and thickness is measured in a direction perpendicular to the topsurface of the substrate; and a third layer between the first layer andthe second layer, wherein an entirety of the third layer is below thetop surface of the substrate.
 14. The integrated circuit of claim 13,wherein a top surface of the second layer is angled relative to a bottomsurface of the second layer by an angle ranging from about 30-degrees toabout 80-degrees.
 15. The integrated circuit of claim 13, furthercomprising a second silicon-containing material structure in a secondregion adjacent to the gate structure.
 16. The integrated circuit ofclaim 15, wherein the second silicon-containing material structure is onan opposite side of the gate structure from the first silicon-containingmaterial structure.
 17. The integrated circuit of claim 13, wherein anentirety of the first silicon-containing material structure is beyond aboundary of the gate structure in a direction parallel to the topsurface of the substrate.
 18. The integrated circuit of claim 13,wherein the third layer has a dopant concentration different from adopant concentration of the first layer.
 19. The integrated circuit ofclaim 13, wherein a material of the second layer is a same material as amaterial of the first layer.
 20. The integrated circuit of claim 13,further comprising a lightly doped drain (LDD) extends from the firstsilicon-containing material in a direction parallel to the top surfaceof the substrate, wherein the LDD directly contacts the third layer.